Lab4MEMS II project is funded by the European Nanoelectronics Initiative Advisory Council (ENIAC) Joint Undertaking (JU), a public-private partnership in nanoelectronics.
Lab4MEMS II focuses on Micro-Opto-Electro-Mechanical Systems (MOEMS) that merge MEMS with Micro-optics to sense or manipulate optical signals using integrated mechanical, optical, and electrical systems. The project maintains its emphasis on the development of a pilot line for next-generation MEMS devices augmented with advanced technologies such as piezoelectric, magnetic materials and 3D packaging.
Project Link:
Date:
2014-11-01 to 2018-04-30