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Type: 
Journal
Description: 
The self-assembly (SA) of DiBlock Copolymers (DBCs) based on the phase separation into different morphologies of small size and high-density features is widely investigated as patterning and nanofabrication technique. The integration of the conventional top-down approaches with the bottom-up SA of DBCs discloses the possibility to address the gap in nano-structured lateral length standards for nano-metrology, consequently supporting the miniaturization processes in device fabrication. In this frame, we studied the pattern ...
Publisher: 
American Chemical Society
Publication date: 
11 Apr 2017
Authors: 

Giulia Aprile, Federico Ferrarese Lupi, Matteo Fretto, Emanuele Enrico, Natascia De Leo, Luca Boarino, Flavio Giovanni Volpe, Gabriele Seguini, Katia Sparnacci, Valentina Gianotti, Michele Laus, Jørgen Garnaes, Michele Perego

Biblio References: 
Origin: 
ACS Applied Materials & Interfaces