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Structural, chemical and optical properties of cerium dioxide film prepared by atomic layer deposition on TiN and Si substrates

Type: 
Journal
Description: 
Publisher: 
Elsevier
Publication date: 
25 May 2017
Authors: 

A. Lamperti S. Vangelista, R. Piagge, S. Ek, T. Sarnet, G. Ghidini, C. Martella

Biblio References: 
Pages: https://doi.org/10.1016/j.tsf.2017.05.0
Origin: 
Thin Solid Films
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…

Scientific Productions