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Type: 
Conference
Description: 
In this paper we present the application of a computationally efficient Rigorous Coupled-Wave Analysis method to solve the electromagnetic radiation scattering problem in devices featuring nano-structured interfaces and multilayer structures. The method, already successfully used to simulate photon propagation and absorption in thin-film solar cells, is used in this work to compute the optical reflectivity of micro- mirrors in Micro-Opto-Electro-Mechanical Systems (MOEMS).
Publisher: 
IEEE
Publication date: 
7 Sep 2017
Authors: 

M Zanuccoli, C Fiegna, E Cianci, C Wiemer, A Lamperti, G Tallarida, L Lamagna, S Losa, S Rossini, F Vercesi, I Semenikhin

Biblio References: 
Pages: 81-84
Origin: 
2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)