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Perpendicularly oriented lamellar forming block copolymers are promising candidates for the fabrication of high aspect ratio nanostructures either by means of direct pattern transfer to the underlying substrate or by sequential infiltration processes. In this work, highly ordered lamellar grains (ξ > 500 nm) were produced by thermally treating the samples at high temperature (Ttarget > 250 °C) in a Rapid Thermal Processing (RTP) machine. The variation of the lateral order of the nanostructures during the annealing process was investigated in detail, by decoupling the effect of the transients and of the isothermal step of the thermal treatment. Moreover, the self-assembly process was studied as a function of the annealing time and temperature in order to identify the processing parameters that maximize the lateral order avoiding, and at the same time, any degradation of the macromolecules. From this study the activation …
Royal Society of Chemistry
Publication date: 
1 Jan 2015

Monica Ceresoli, Flavio Giovanni Volpe, Gabriele Seguini, Diego Antonioli, Valentina Gianotti, Katia Sparnacci, Michele Laus, Michele Perego

Biblio References: 
Volume: 3 Issue: 33 Pages: 8618-8624
Journal of Materials Chemistry C