In this study we detected the positive perpendicular strain (ɛ⊥) due to end of range (EOR) defects formed in Ge amorphized with 300keV, 2.5× 1015Ge/cm2 at liquid nitrogen temperature by means of high-resolution X-ray diffraction. We found that, after complete solid phase epitaxial recrystallization of the amorphous layer (about 1h at 340° C), only 2% of the original ɛ⊥ survives. This strain completely disappears after 270min at 405° C. On the other hand, after this more aggressive annealing, a thin negatively strained layer ...