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Functional Materials and Devices

Atomic layer deposition for MOEMS and MEMS applications

Due to the high conformality, excellent thickness control, availability of dense and pinhole free films of different materials at low deposition temperature and low cost, atomic layer deposition (...

Synthesis and Investigation of Multifunctional Materials

The activity at IMM Agrate is mainly focused on the synthesis and advanced characterization of materials displaying diverse functionalities. As concerning the growth, our work is focused on the...

Single atom electronics with nanowires: a route to ultra-scaled quantum devices

The doping of semiconductors is a key element for the production of semiconductor devices, and it has been widely studied for bulk crystals. The possibility of realizing semiconductor nanowires...