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Nanoscale Periodic Modulation of Doping over Large Areas with Block Copolymer Lithography and Ion Implantation

Type: 
Journal
Description: 
Publisher: 
The Electrochemical Society, Inc.
Publication date: 
22 Dec 2023
Authors: 

Stefano Kuschlan, Valentina Gianotti, Michele Laus, Francesc Pérez-Murano, Jordi Llobet, Marta Fernandez-Regulez, Caroline Bonafos, Michele Perego, Gabriele Seguini, Marco De Michielis, Graziella Tallarida

Biblio References: 
Issue: 30 Pages: 1536-1536
Origin: 
Electrochemical Society Meeting Abstracts 244
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie…

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