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Type: 
Journal
Description: 
The control of the self-assembly (SA) process and nanostructure orientation in diblock copolymer (DBC) thick films is a crucial technological issue. Perpendicular orientation of the nanostructures in symmetric and asymmetric poly(styrene)-b-poly(methyl methacrylate) (PS-b-PMMA) block copolymer films obtained by means of simple thermal treatments was demonstrated to occur in well-defined thickness windows featuring modest maximum values, thus resulting in low aspect ratio (h/d < 2) of the final lithographic mask. In this manuscript, the thickness window corresponding to the perpendicular orientation of the cylindrical structures in asymmetric DBC is investigated at high temperatures (190 degrees C
Publisher: 
AMER CHEMICAL SOC
Publication date: 
20 Dec 2014
Authors: 

F Ferrarese Lupi, TJ Giammaria, FG Volpe, F Lotto, G Seguini, B Pivac, M Laus, M Perego

Biblio References: 
Volume: 6 Issue: 23 Pages: 21389-21396
Origin: 
ACS Applied Materials & Interfaces