Thermal properties of phase change chalcogenide alloys involved in the phase change memory devices are measured using experimental techniques suitable with the observation scale. The modulated photothermal radiometry, the time resolved pump-probe thermoreflectance and the scanning thermal microscopy are used in a general inverse approach. This note aims to describe the work we have done during the ten last years in terms of experimental techniques and comparison with theoretical models.
Begel House Inc.
1 Jan 2018
International Heat Transfer Conference Digital Library