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The morphological evolution of cylinder-forming poly(styrene)-b-poly(methyl methacrylate) block copolymer (BCP) thick films treated at high temperatures in the rapid thermal processing (RTP) machine was monitored by means of in-depth grazing-incidence small-angle X-ray scattering (GISAXS). The use of this nondisruptive technique allowed one to reveal the formation of buried layers composed of both parallel- and perpendicular-oriented cylinders as a function of the film thickness (24 ≤ h ≤ 840 nm) and annealing time (0 ≤ t ≤ 900 s). Three distinct behaviors were observed depending on the film thickness. Up to h ≤ 160 nm, a homogeneous film consisting of perpendicular-oriented cylinders is observed. When h is between 160 and 700 nm, a decoupling process between both the air-BCP and substrate-BCP interfaces takes place, leading to the formation of mixed orientations (parallel and perpendicular) of …
Publication date: 
29 Mar 2017

Federico Ferrarese Lupi, Tommaso Jacopo Giammaria, Gabriele Seguini, Michele Laus, Pavo Dubček, Branko Pivac, Sigrid Bernstorff, Michele Perego

Biblio References: 
Volume: 9 Issue: 12 Pages: 11054-11063
ACS applied materials & interfaces