Type:
Journal
Description:
The morphological evolution of cylinder forming poly (styrene)-b-poly (methyl methacrylate)(PS-b-PMMA) block copolymers (BCPs) thick films treated at high temperatures in the Rapid Thermal Processing (RTP) machine was monitored by means of in-depth Grazing Incidence Small Angle X-ray Scattering (GISAXS). The use of this non-disruptive technique allowed revealing the formation of buried layers composed of both parallel and perpendicular oriented cylinders as a function of the film thickness (24≤ h≤ 840 nm) and annealing time (0≤ t≤ 900
Publisher:
Publication date:
29 Mar 2017
Biblio References:
Volume: 9 Pages: 11054-11063
Origin:
ACS Appl. Mater. Interfaces