A quantitative investigation of the process parameter when structuring the photosensitive glass Foturan® is presented. Exposure doses in the range of 1.5% -100% (relative units) were experimented and features in the range have been patterned. The latent image has been investigated after annealing in order to identify the optimal exposure conditions. Size and roughness have been measured in the exposed zones. Enlargements of the features from 0.001mm up to 0.01 mm have been noticed independent on the size, due mainly to the light diffraction at the mask edges and limiting the smallest patterned feature width at 0.01mm.
1 Jan 2005
Sensors And Microsystems