-A A +A
Significant research effort is currently being devoted to study deposition, dielectric, and electronic properties of binary rare earth oxides, as well as of complex oxides based on rare earth elements. Most of the motivations justifying this effort are found in the field of microelectronics – especially in the search of high dielectric constant oxides as candidates to substitute SiO2 – and these will be mostly discussed. Open problems and issues from the scientific and technological point of view are discussed, and applications in fields other than microelectronics (such as spintronics) are also mentioned.
Springer, Berlin, Heidelberg
Publication date: 
1 Jan 2007

Giovanna Scarel, Axel Svane, Marco Fanciulli

Biblio References: 
Pages: 1-14
Rare Earth oxide thin films